Ceramic Radiating Cooper Sputtering System / Ceramic Chips Directly
Plating Copper Sputtering Equipment
Cooper Magnetron Sputtering Coating Plant on Ceramic Radiating
The DPC process- Direct Plating Copper is an advanced coating
technology applied with LED / semiconductor / electronic
industries. One typical application is Ceramic Radiating Substrate.
Cooper conductive film deposition on Al2O3, AlN substrates by PVD
vacuum sputtering technology, compared with traditional
manufacturing methods: DBC LTCC HTCC, much lower production cost is
its high feature.
Royal technology team assisted our customer to developed the DPC
process successfully with PVD sputtering technology.
The RTAC1215-SP machine designed exclusively for Copper conductive
film coating on Ceramic chips, ceramic circuit board.
Copper Sputtering Coating Machine Key Features
1. Equipped with 8 steer arc cathodes and DC Sputtering Cathodes,
MF Sputtering Cathodes, Ion source unit.
2. Multilayer and co-deposition coating available
3. Ion source for plasma cleaning pre-treatment and Ion-beam
assisted deposition to enhance the film adhesion.
4. Ceramic/ Al2O3/AlN substrates heating up unit;
5. Substrate rotation and revolution system, for 1-side coating and
Copper Sputtering Coating Machine Specifications
1. Ultimate Vacuum Pressure: better than 5.0×10-6 Torr.
2. Operating Vacuum Pressure: 1.0×10-4 Torr.
3. Pumpingdown Time: from 1 atm to 1.0×10-4 Torr≤ 3 minutes ( room temperature, dry, clean and empty chamber)
4. Metalizing material (sputtering + Arc evaporation): Ni, Cu, Ag,
Au, Ti, Zr, Cr etc.
5. Operating Model: Full Automatically /Semi-Auto/ Manually
The vacuum coating machine contains key completed system listed
1. Vacuum Chamber
2. Rouhging Vacuum Pumping System (Backing Pump Package)
3. High Vacuum Pumping System ( Magnetically Suspension Molecular
4. Electrical Control and Operation System
5. Auxiliarry Facility System (Sub System)
6. Deposition System
Al2O3, AlN substrates with Copper Plating Samples
Please contact us for more specifications, Royal Technology is
honored to provide you total coating solutions.